Nondestructive inspection, non destructive testing and non destructive evaluation are recurrent terms in many fields from the high-tech development to the past footsteps conservation. This book collects theories and practices for several different non-destructive inspection techniques.
By taking a practical approach to the industrial inspection of digital holography, Digital Holography for MEMS and Microsystem Metrology offers a description of the use of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation and device testing and inspection.
Presents and reviews data on non-destructive testing discussing topics such as: a non-contacting thermoelectric method for non-destructive detection of material imperfections in metals by magnetic sensing; laser generated ultrasound as a tool for defect detection combined with air-coupled receivers; and, the photothermal deflection technique.